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Sensors and measurement systems is an introduction to microsensors
for engineering students in the final undergraduate or early
graduate level, technicians who wants to know more about the
systems they are using, and anybody curious enough to know what
microsystems and microsensors can do. The book discusses five
families of sensors: - Thermal sensors - Force and pressure sensors
- Inertial sensors - Magnetic field sensors - Flow sensors For each
sensor, theoretical, technology and application aspects are
examined. The sensor function is modelled to understand
sensitivity, resolution and noise. We ask ourselves: What do we
want to measure? What are possible applications? How are the sensor
chips made in the cleanroom? How are they mounted and integrated in
a system? After reading this book, you should be able to: -
Understand important thermal, mechanical, inertial and magnetic
sensors - Work with characterization parameters for sensors -
Choose sensors for a given application and apply them - Understand
micromachining technologies for sensors
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